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The thermal diffusion of Nd^3+ and Gd^3+ ions in YVO_4 is characterized, yielding diffusion rates of 7X10^-19 and 44X10^-19 m^2s^-1, respectively, at 1400°C and activation energies of 5.3X10^-19 and 2.9X10^-19 J, respectively, for diffusion along the c axis. The fluorescence properties of the Nd^3+ -diffused YVO_4 agree well with those of bulk doped materials. The formation of a planar optical waveguide was also observed for one of the Nd^3+ -diffused samples. This characterization is a significant first step toward fabrication of waveguide lasers and amplifiers in this important laser material.